With the wide application of high-precision linear motor modules in fields such as semiconductor equipment, precision machine tools, lithium battery manufacturing, and medical automation, the performance of the position feedback system directly determines the motion control accuracy and dynamic response capability of the equipment. The absolute value magnetic gate encoder has gradually become the core position detection solution for linear motor modules due to its advantages such as high resolution, strong anti-interference ability, and position retention after power failure. Below, we will analyze the core performance requirements of customers for absolute value magnetic gate encoders in combination with industry application scenarios, and discuss the current market demand trends.
1. Core performance requirements of linear motor modules for absolute value magnetic gate encoders
Ultra-high resolution and nanometer-level accuracy
Linear motor modules are typically used in high-precision positioning scenarios (such as chip lithography and precision measurement),
and customers have extremely high requirements for the resolution of encoders.
Resolution requirement: Semiconductor equipment: ≤5nm (For example, ASML lithography machines adopt the Heidenhain X series, with a resolution of up to 1nm).
Lithium electrode sheet cutting: ≤0.1μm (ensure that the electrode sheet is slitted without burrs).
Absolute accuracy compensation: It is necessary to compensate for the specific errors of linear motors,
such as the thermal expansion of the magnetic grid (CTE of the steel-based magnetic grid is 11.5ppm/℃) and the matching issue with the motor base (such as ceramic or ductile steel).
High-end systems adopt dynamic error compensation technology (such as Renishaw's encoder with built-in temperature sensors, which can adjust the position output in real time).
2. High-speed dynamic response capability
The acceleration and speed of linear motors far exceed those of traditional rotary motors, which poses extremely high challenges to the signal processing capabilities of encoders.
Speed requirement:
Surface mount technology (SMT) machine/panel handling: 2 to 5m/s, with the encoder response frequency ≥1MHz.
High-speed stamping machine tools: above 10m/s (for instance, multiple absolute value magnetic grating encoders from Tianshu Digital Intelligence and Cizheng Intelligence support 8m/s).
Acceleration influence:
Short-stroke high-frequency movements (such as dispensing machines in the 3C industry) need to withstand an acceleration of 50m/s².
The non-contact reading head of the magnetic grid (with a gap of 0.3±0.1mm) can prevent mechanical wear.
3. Harsh environmental adaptability
Linear motors often operate in harsh environments, and encoders need to have excellent environmental adaptability and super reliability.
Anti-pollution capacity:
The oil mist and dust environment of metalworking machine tools requires IP67 protection (magnetic grids are more resistant to contamination than optical encoders).
Anti-magnetic field interference
The strong excitation magnetic field (0.5-1T) of the linear motor may interfere with the signal and needs to pass the IEC 61000-4-8 certification.
Vacuum compatibility
Semiconductor equipment requires that the magnetic gate be free from venting contamination under a vacuum of 10⁻⁶ Pa (stainless steel seal + special lubricant).
4. Mechanical integration and installation tolerance
The linear motor module has a compact structure, and the installation flexibility of the encoder is of vital importance.
Installation tolerance:
Lateral offset tolerance: ±0.5mm (superior to ±0.2mm of optical encoders). Pitch/yaw Angle tolerance: Signal does not attenuate within ±0.5°.
Stiffness matching
The natural frequency of the magnetic grid support should be greater than 500Hz to avoid vibration coupling with the motor (carbon fiber supports can reduce the risk of resonance).
5. Multi-axis synchronization and long stroke control
Multi-axis synchronization error
The dual-drive gantry structure requires that the clock synchronization jitter among multiple magnetic gates be less than 10ns (achieved through EtherCAT distributed clock).
Long-stroke splicing accuracy
For a stroke of more than 10 meters, the cumulative error at the joint of the magnetic grid should be less than ±2μm/m (laser interferometer calibration + temperature compensation algorithm).
6. Technological Development Trends
Higher resolution and intelligent compensation:
The new generation of magnetic gates adopts AI real-time error compensation (for instance, the FMG3000 absolute value magnetic gate encoder from
Tianxian Digital Intelligence/Cizheng Intelligence achieves real-time error compensation through FPGA acceleration algorithms and segmented temperature compensation technology).
Wireless power supply and battery-free design
The Wiegand effect-powered encoder has emerged in the AGV field, solving the problem of battery replacement.
Industrial Internet of Things (IIoT) Integration
Encoders that support IO-Link and OPC UA can achieve predictive maintenance (such as monitoring the wear status of magnetic grids).
Ii. Domestic Market Demand Analysis of Linear Motor Modules for Absolute Value Magnetic Gate Encoders
Industry applications drive demand growth
Industry | Typical applications | Core requirements | Market size (Forecast for 2025) |
Semiconductor equipment | Photolithography machines, wafer handling | Nanoscale resolution, vacuum compatibility | ¥1.2 billion (annual increase of 15%) |
Lithium battery manufacturing | Electrode sheet slitting and laminating machine | 0.1μm accuracy and dust resistance | 800 million yuan (increasing by 20% annually) |
Medical automation | Surgical robots, CT machines | Non-magnetic interference, SIL3 safety certification | 500 million yuan (annual increase of 12%) |
Precision machine tool | Five-axis machining center | Multi-axis synchronization and high dynamic response | 1 billion yuan (annual increase of 8%) |
Competitive landscape and opportunities for localization
International brands dominate the high-end market:
Heidenhain, Renishaw and others dominate the high-end markets such as semiconductors and photolithography machines, with prices as high as ¥2000+ per set.
Acceleration of domestic substitution
Enterprises such as Changchun Institute of Optics, Fine Mechanics and Physics and Shenzhen Tianxian Digital Intelligence/
Cizheng Intelligent have launched 0.1μm resolution absolute value magnetic gate encoders,
which are priced at only one-third of imported brands and are rapidly penetrating the lithium battery and 3C industries.
Looking to the future, the application of absolute value magnetic grating encoders in linear motor modules will continue to deepen.
The market will show three major trends: high precision, intelligence, and localization. Domestic leading manufacturers represented by Shenzhen
Tianxian Digital Intelligence/Cizheng Intelligence are closely focusing on industry pain points to provide customized solutions that can meet different customer needs.